The Propolys project, conducted at CEA-Leti between 2021 and 2025, successfully validated several key technology building blocks for the development of full-color micro-LED displays. Supported by Carnotfunding, the project will contribute to future augmented reality applications.
At the heart of augmented reality glasses and headsets are micro-displays measuring barely a centimeter across. These tiny displays can integrate millions of micro-LEDs, light sources only a few micrometers in size.
In particular, gallium nitride (GaN)-based micro-LEDs offer significantly higher brightness than current OLED technologies. This is essential for displaying information overlaid on glasses, even in bright ambient environments.
The Propolys teams therefore decided to explore an innovative approach: sequentially growing the structures emitting the three colors on the same substrate, rather than assembling several monochrome displays, as is currently done.
This strategy was made possible by combining a wide range of CEA-Leti expertise.
The project brought together around twenty researchers from four laboratories of the Optics and Photonics Department and the Technology Platforms Department.
This rare combination of complementary expertise enabled the teams to continuously fine-tune both the epitaxy and component manufacturing processes.
The results are particularly encouraging.
After four years of research, the teams successfully obtained blue, green and red emitters on a 200 mm GaN-on-silicon substrate. They also demonstrated several successive epitaxial growth sequences on the same substrate, producing blue and green emitters side by side with a 5 µm pixel pitch.
Most importantly, they developed an integration process compatible with the fabrication of a micro-display.
This monolithic integration approach represents a key step toward future industrial developments in a market that is both highly promising and highly competitive.
However, developing a complete RGB display will require further progress.
The knowledge and expertise acquired through Propolys now provide a strong foundation for further development of full-color micro-LED displays and for establishing future industrial partnerships.