EUROSOI-ULIS 2026

EUROSOI-ULIS 2026

CEA-Leti Original
摘要
法国CEA-Leti研究所将在2026年EuroSOI Ulis会议上发表11篇论文,巩固其在全耗尽绝缘体上硅(FD-SOI)等先进硅集成领域的领先研究地位。这些成果涵盖量子计算射频表征、10纳米节点自对准双图案化及应变工程等关键技术,有望推动下一代高性能、低功耗微电子器件的商业化,并促进产学研合作。

CEA-Leti将在2026年5月20日至22日于西班牙格拉纳达举行的EUROSOI-ULIS 2026会议上发表11篇论文,再次彰显其在先进硅集成领域的核心研究地位。此次展示的科研成果覆盖了FD-SOI技术与量子计算、先进工艺、器件建模等多个前沿方向,凸显了该机构在推动下一代微电子创新中的关键作用。

论文选题紧密围绕FD-SOI生态展开。在量子计算应用方面,团队将展示P28 FD-SOI平台上用于VCO和PLL设计的无源器件低温RF特性,并提出一种可扩展的时分复用偏置架构用于FD-SOI自旋量子比特;同时通过TCAD仿真解析室温下自旋量子比特器件的电学特性。在先进器件结构上,BOX CREEP技术作为下一代FDSOI的机械增强方案首次亮相,表面活化热键合方法实现了8英寸晶圆上薄单晶硅膜的应变工程。制造工艺方面,研究涉及25纳米FD-SOI n-MOSFET中源漏离子注入与尖峰退火对电参数的影响,10纳米节点SADP工艺的心轴材料选择,以及为先进RF FD-SOI器件开发的降低金属栅高度与原位掺杂渐变抬升源漏技术。此外,还有针对堆叠MoS₂沟道FET的通道后集成方案的深入TCAD研究,以及先进FD-SOI节点中穿通失效的抑制方法。在建模领域,分离式MLP架构被提出用于联合精确建模FD-SOI晶体管的漏极和栅极电流。

EUROSOI-ULIS 2026旨在为科学家和工程师搭建一个互动论坛,促进学术界、研究机构与产业界在SOI技术及先进微电子器件领域的合作与伙伴关系。

此外,CEA同期发布了多个活动预告。2026年9月29日,CEA将在格勒诺布尔举办“Organoids & Organoids-on-Chip”研讨会。在6月23日至25日的LID World Summit上,CEA-Leti专家将在502号展位展示七篇涵盖混合键合与低温处理工艺的论文和海报,并推出面向下一代显示和数据通信的高性能microLED解决方案。

更多关于EUROSOI-ULIS 2026的信息,可访问会议官方网站,或联系Joris Lacord。

Summary
CEA-Leti will present 11 papers at EuroSOI ULIS 2026 in Granada, covering advanced FD-SOI technologies such as 10 nm node integration, cryogenic RF for quantum computing, and stacked MoS₂ channel FETs. The institute, represented by contact Joris Lacord, reinforces its position as a key research center in ultimate silicon integration, driving innovations that enhance semiconductor scaling and enable next-generation quantum and RF devices.

CEA-Leti will present 11 papers at EUROSOI-ULIS 2026, taking place in Granada, Spain, from May 20 to 22, underscoring its position as a premier research center for advanced silicon integration. The contributions span device fabrication, modeling, and simulation, with a strong focus on fully depleted silicon-on-insulator (FD-SOI) technology and its emerging applications.

Key topics include cryogenic RF characterization of passive components for VCO and PLL design in P28 FD-SOI, aimed at quantum computing; a mechanical strain booster called “BOX CREEP” for next-generation FD-SOI; and strain engineering of thin monocrystalline Si films on 8-inch wafers via surface activated hot bonding. Process-level studies address the impact of source/drain dopant implantation and spike annealing on 25 nm FD-SOI n-MOSFETs, mandrel material selection for self-aligned double patterning at the 10 nm node, and novel structures such as reduced metal gate height combined with in-situ doped faceted raised source/drain regions for advanced RF devices. Simulation work includes TCAD studies of stacked MoS₂ channel FETs with a channel-last integration, and room-temperature electrical characterization of FD-SOI spin qubit devices using TCAD. Additional papers cover punch-through failure mitigation in advanced nodes, a split MLP architecture for joint modeling of drain and gate currents, and a scalable time-multiplexed biasing architecture for FD-SOI spin qubits.

The conference aims to bring together academia, research institutions, and industry to foster collaboration on SOI technology and advanced microelectronic devices. For further details, contact Joris Lacord.

Beyond EUROSOI-ULIS, CEA-Leti is also hosting an “Organoids & Organoids-on-Chip” workshop in Grenoble on September 29, 2026, and will exhibit at the LID World Summit from June 23 to 25 at Maison Minatec, Grenoble. At booth 502, experts will discuss seven papers and posters on hybrid bonding and low-temperature processing, and introduce high-performance microLED solutions for next-generation displays and data communications.

Résumé
Avec 11 articles présentés à EuroSOI Ulis 2026, le CEA-Leti dévoile des avancées majeures en intégration silicium FD-SOI pour l'informatique quantique, les dispositifs RF et l'ingénierie des contraintes. L'institut, représenté par Joris Lacord, confirme ainsi son leadership et favorise les collaborations entre recherche académique et industriels. Ces résultats ont un impact direct sur les futures technologies quantiques et les communications sans fil avancées.

From 5/20/2026 to 5/22/2026Granada, SPAIN

With 11 papers, Leti has established itself as a leading research centre in the field of advanced silicon integration.​

DISCOVER CEA-LETI’S MAJOR SCIENTIFIC RESULTS

With 11 papers, the institute will present this year’s major scientific results at EuroSOI Ulis, including the following topics:

Cryogenic RF Characterisation of Passive Components for VCO and PLL Design in P28 FD-SOI for Quantum Computing Applications​

BOX CREEP: A Mechanical Booster for Next-Generation FDSOI

Strain engineering of thin monocrystalline Si films on 8-inch wafers using Surface Activated Hot Bonding​

Impact of source/drain dopant implantation and spikeannealing on electrical parameters of 25 nm FDSOI n-MOSFETs

Mandrel material selection as prerequisite for SADP implementation at the 10 nm FD-SOI node

In-depth TCAD study of stacked MoS₂ channel FETs based on a channel-last integration

Understanding room-temperature electrical characterizations of FDSOI spin qubit devices via TCAD simulations

Reduced metal gate height and in-situ doped faceted raised source and drain regions for advanced RF FD-SOI devices​

Punch-Through Failure Mitigation in Advanced FD-SOI Nodes​​

Split MLP Architectures for Accurate Joint Modeling of drain and gate currents in FD-SOI Transistors​

​A S​calable Time-Multiplexed Biasing Architecture for FDSOI Spin Qubits

This conference aims to bring together scientists and engineers in an interactive forum to discuss SOI technology and advanced microelectronic devices. A key objective is to foster collaboration and partnerships among academia, research institutions, and industry stakeholders in the field.​

More information on​​EURO​​SOI-ULIS ​2026website​

From5/20/2026to5/22/2026|​Granada, SPAIN​​

Contact:​Joris LACORD​​​with any questions.​​

Event | Agenda|Y-Spot Partners, Grenoble, France

We are delighted to announce that CEA is hosting the "Organoids & Organoids-on-Chip" workshop at its Grenoble site on September 29, 2026.

Event|Maison Minatec, Grenoble, France

LID World Summit from 23 to 25 June offer you a front-row seat to our most recent advances. Join more than 1,250 semiconductor industry professionals at this three-day global event and come away equipped and inspired to innovate!​

CEA-Leti experts will be onsite at booth 502 and available to discuss the findings of Seven Papers and Posters Includes Hybrid Bonding and Low-Temperature Processing

Avec 11 papiers, le Leti se positionne comme un centre de recherche incontournable dans le domaine de l'intégration ultime sur silicium.

CEA-Leti will introduce their high-performance microLED solutions for next-generation displays and data communications.

AI Insight
核心要点

CEA-Leti将在EUROSOI-ULIS 2026发表11篇论文,展示FD-SOI及量子计算等前沿硅集成技术,巩固其在该领域的领先研究地位。

关键参与者

CEA-Leti — 法国微电子与纳米技术研究院,位于格勒诺布尔。

行业影响
  • ICT:高 — 推动FD-SOI先进节点及量子计算芯片创新
  • 终端/消费电子:高 — microLED技术用于下一代显示与数据通信
  • 计算/AI:高 — 自旋量子比特及堆叠晶体管突破提升算力潜力
追踪

持续监测 — 研究尚处早期阶段,需关注其商业化路径及对半导体供应链的潜在影响。

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2026-05-13 15:22
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