CEA Leti将在IRPS 2026展示其在微电子可靠性方面的集成专业能力

CEA Leti to Showcase Integrated Expertise In Microelectronics Reliability at IRPS 2026

CEA-Leti Original
摘要
在2026年IRPS国际可靠性物理研讨会上,CEA-Leti将发布7篇论文,并参与另外2个项目,研究覆盖器件物理、工艺集成、RF、FD-SOI、GaN、BEOL可靠性及低温3D顺序集成等方向。论文与STMicroelectronics、明尼苏达大学等合作,重点展示了基于物理建模和先进表征的早期可靠性评估方法,可为功放、汽车/航天GaN器件、3D图像传感器和先进FD-SOI/GAA/CFET设计提供更稳健的工业级优化路径。

在 IRPS 2026(International Reliability Physics Symposium,微电子可靠性领域最重要的学术会议之一)上,CEA-Leti 将集中展示其在微电子可靠性方面的“全栈式”能力:从器件物理、工艺集成、射频技术、FD-SOI、GaN、BEOL 可靠性,到支撑 3D sequential integration 的低温平台,覆盖面极广。此次共有 7 篇论文由 CEA-Leti 直接发表,另有研究工程师参与的 2 个项目也将亮相。机构强调,这些工作结合了创新表征方法与基于物理的建模,目标是在技术开发早期就给出可靠性洞察,帮助工艺开发者和电路设计者更快走向可量产、可工业化的方案。

其中,射频方向的论文《RF Aging Extensive Characterization & Modeling for Reliability-Aware Power Amplifier Design》将于 3 月 26 日 13:35–14:00 发表。该研究由 Tarek Daher 和 Alexis Divay 与 STMicroelectronics 合作完成,提出一种新方法,可在真实 RF 应力条件下直接测量独立 SOI 功率放大器的热载流子诱导(HCI)寿命,并覆盖不同偏置条件与负载阻抗失配情况。研究生成了经验性的失效时间等高线图,让设计者在早期 PA 设计阶段就能直观看到性能与可靠性之间的权衡,面向 mmWave 5G 及 beyond-5G 应用尤为关键。

在 GaN 方向,论文《Thermal Robustness of a CMOS-Compatible GaN-on-Si MIS-HEMT Technology》将于 3 月 26 日 15:25–15:50 介绍。研究对 0.15 µm 的 SiN/InAlN/GaN MIS-HEMT 进行了长达 1,400 小时、最高 375°C 的无偏置存储测试,结果显示器件仅出现约 -200 mV 的阈值电压(Vth)漂移、接触电阻约 20% 上升,以及 Id 和 gm 的小幅下降。显微分析确认,由于采用了耐火金属合金栅极,侧壁没有发生互扩散。CEA-Leti 认为,这证明 GaN 功率模块可以单片集成到硅上,适用于高温汽车电子或航空航天电子系统。

在 BEOL 与 3D sequential integration 相关方向,CEA-Leti 还将展示一项关于 2.5 V BEOL-compatible CMOS 的 BTI 十年寿命研究,核心目标是在不超过 420°C 的条件下,为可堆叠的 3D sequential 工艺提供可靠性支撑。

器件退化机理方面,论文《Influence of Channel Doping on HCI Degradation in Analog SOI nMOSFETs》将于 3 月 24 日 16:30–16:55 发表。该工作结合 TCAD 仿真与实验验证表明:沟道掺杂越低,碰撞电离区域越大,热载流子生成与界面陷阱形成也越严重,尤其发生在 nitrided SiO₂ 栅的 SOI nMOSFET 中。研究将沟道注入剂量纳入 Takeda 模型后,能够准确预测 time-to-failure 的上升趋势,为模拟电路设计者通过调整掺杂剖面来缓解 HCI 提供了明确路径。

互连可靠性方面,论文《Improving Electromigration Lifetime Through Power-Grid Segmentation: An Experimental Study》将于 3 月 26 日 14:00–14:25 发表。该研究由 University of Minnesota 的 Robert Bloom 主导,CEA-Leti 的 Stéphane Moreau 参与。硅级电迁移(EM)测试显示,采用分段式 power-grid 结构可利用 Blech effect:更短的线段能减少应力迁移导致的空洞形成,从而显著延长失效时间,并减小 IR-drop 漂移。对先进工艺节点中承载大电流的 BEOL 电源网而言,分段设计成为一种可直接在版图层面使用的可靠性增强手段。

在 3D sequential CMOS image sensor 相关研究中,论文《Ground-Plane Effect on Random Telegraph Noise in Mesa-Isolated SOI MOSFETs for 3D Sequential CISi》将于 3 月 24 日 23:20–23:45 发表。该项工作由 STMicroelectronics 的 Ahmed Machmach 参与,CEA-Leti 的 Joris Lacord 和 Fabienne Ponthenier 提供支持。研究发现,提高 substrate(ground-plane)偏置会重塑沟道电场,使更多氧化层陷阱事件超过检测阈值,从而放大电流尖峰和随机电报噪声(RTN)。这种可控的 RTN 增强机制,有助于设计者预测并抑制 3D sequential CMOS 图像传感器中的噪声问题。

另一篇关于偏置温度不稳定性的论文《Dit-Nt Correlation in pBTI Stressed SOI nMOSFET via Low Frequency Noise Measurements》将于 3 月 24 日 14:00–14:25 发表。低频噪声测量显示,随着 pBTI 应力累积,氧化层陷阱密度 Nt 与界面陷阱密度 Dit 几乎同步上升。两者的紧密相关说明,界面质量是应力诱发噪声的主导因素,这也再次强调未来 FD-SOI 器件必须强化界面工程。

在先进 FD-SOI 节点的 HCI 退化研究中,论文《Spacer Trapping Effect on Hot-Carrier Degradation Dynamics for Advanced FD-SOI Nodes》将于 3 月 25 日 14:00–14:25 发表。研究比较了高陷阱与低陷阱 SiCO spacer,发现 spacer 中的俘获电荷主导了早期 HCI 老化,但很快就会饱和;而低陷阱 spacer 可完全抑制这一早期退化。结论非常直接:spacer 材料选择将成为延长器件寿命的关键杠杆,对未来 GAA 和 CFET 平台同样具有参考价值。

最后,论文《Modeling the Impact of HK Thickness Scaling (Down to 1.1 nm) on Gate Leakage and PBTI in Advanced FD-SOI Devices》将于 3 月 24 日 16:05–16:30 发表。作者 Elhadji Alhousseyni Diallo 采用直接隧穿物理与 Comphy 仿真,定量分析了超薄 high-k(HK)层对栅漏电和正偏置温度不稳定性(PBTI)的影响。结果显示,当氧化层厚度低于 2 nm 时,隧穿质量参数升高,表明微结构发生变化;与此同时,减薄 HK 层既能降低漏电,也能提升 PBTI 耐受性。研究给出了经过校准的模型,供设计者在推进下一代 FD-SOI 的 HK 缩放时使用。

这批工作由 NexGen 2030、FAMES Pilot Line 和 IRT Nanoelec 提供支持。整体来看,CEA-Leti 在 IRPS 2026 上传递的信号很明确:可靠性不再只是后期验证环节,而是要在器件、材料、工艺和版图层面前置设计,通过实验与建模并行,把“可用”推进到“可量产、可长期稳定运行”。

Summary
At IRPS 2026 in Grenoble, CEA-Leti will present seven papers on microelectronics reliability spanning RF aging, GaN-on-Si thermal robustness, BEOL electromigration, FD-SOI degradation, and low-temperature 3D sequential integration, with additional contributions from STMicroelectronics and the University of Minnesota. The studies combine advanced characterization and physics-based modeling to help device and circuit designers improve lifetime, noise, leakage, and high-current robustness in next-generation industrial-grade chips, supported by NexGen 2030, FAMES Pilot Line, and IRT Nanoelec.

At IRPS 2026, the premier forum for microelectronics reliability research, CEA-Leti will present seven papers that underscore its broad, integrated expertise across device physics, process integration, RF technologies, FD-SOI, GaN, BEOL reliability and low-temperature platforms for 3D sequential integration. The Grenoble-based institute says its researchers combine advanced characterization with physics-based modeling to deliver early-stage reliability insights that help both technology developers and circuit designers move toward robust, industrial-grade solutions. CEA-Leti engineers also contributed to two additional projects that will be presented at the symposium.

One of the most application-oriented papers, “RF Aging Extensive Characterization & Modeling for Reliability-Aware Power Amplifier Design,” will be presented on Thursday, March 26, from 1:35 to 2:00 PM by Tarek Daher and Alexis Divay in collaboration with STMicroelectronics. The work introduces a methodology that directly measures hot-carrier-induced lifetime in standalone SOI power amplifiers under realistic RF stress, including varied bias conditions and load-impedance mismatches. By producing empirical time-to-failure contour maps, the team gives designers an immediate view of the trade-off between performance and reliability during early PA design for mmWave 5G and beyond-5G systems.

CEA-Leti will also highlight progress on GaN integration with “Thermal Robustness of a CMOS-Compatible GaN-on-Si MIS-HEMT Technology,” scheduled for Thursday, March 26, from 3:25 to 3:50 PM. After 1,400 hours of unbiased storage at temperatures up to 375°C, 0.15 µm SiN/InAlN/GaN MIS-HEMTs showed only a modest threshold-voltage shift of about -200 mV, roughly a 20% increase in contact resistance, and small reductions in drain current and transconductance. Microscopy found no side-wall interdiffusion, which the institute attributes to the use of a refractory alloy gate. The result supports the case for monolithic GaN power blocks on silicon for high-temperature automotive and aerospace electronics.

In BEOL reliability, the paper “Improving Electromigration Lifetime Through Power-Grid Segmentation: An Experimental Study,” presented Thursday, March 26, from 2:00 to 2:25 PM, shows how segmentation can extend lifetime. Robert Bloom of the University of Minnesota, with contribution from Stéphane Moreau of CEA-Leti, used silicon-level electromigration tests on segmented power-grid structures to exploit the Blech effect. Shorter segments reduced stress-migration-driven void formation, leading to significantly longer time-to-failure and smaller IR-drop shifts. The finding positions power-grid segmentation as a practical layout-level lever for improving electromigration robustness in advanced nodes carrying high current.

Several papers focus on degradation mechanisms in SOI and FD-SOI devices. “Influence of Channel Doping on HCI Degradation in Analog SOI nMOSFETs,” presented Tuesday, March 24, from 4:30 to 4:55 PM, combines TCAD simulations with experiments to show that lower channel doping expands the impact-ionization region, increasing hot-carrier generation and interface-trap formation in nitrided SiO2-gate SOI nMOSFETs. By incorporating channel implantation dose into the Takeda model, the researchers accurately predict the observed rise in time-to-failure, offering analog designers a way to mitigate HCI through doping-profile optimization.

Another study, “Dit-Nt Correlation in pBTI Stressed SOI nMOSFET via Low Frequency Noise Measurements,” presented Tuesday, March 24, from 2:00 to 2:25 PM, uses low-frequency-noise measurements to show that as pBTI stress progresses, oxide-trap density (Nt) rises in lockstep with interface-trap density (Dit). The strong correlation suggests that interface quality is the dominant factor in stress-induced noise, reinforcing the need for robust interface engineering in future FD-SOI devices.

CEA-Leti is also presenting work on spacer materials and gate-stack scaling. “Spacer Trapping Effect on Hot-Carrier Degradation Dynamics for Advanced FD-SOI Nodes,” scheduled for Wednesday, March 25, from 2:00 to 2:25 PM, compares high- and low-trapping SiCO spacers. The study finds that trapped charge in spacers dominates early HCI wear but saturates quickly, while low-trapping spacers completely suppress this early degradation. The implication is that spacer material choice is a key lever for extending lifetime in future GAA and CFET platforms.

In “Modeling the Impact of HK Thickness Scaling (Down to 1.1 nm) on Gate Leakage and PBTI in Advanced FD-SOI Devices,” presented Tuesday, March 24, from 4:05 to 4:30 PM, Elhadji Alhousseyni Diallo uses direct-tunnelling physics and Comphy simulations to quantify how ultra-thin high-k layers affect gate leakage and positive-bias-temperature-instability. The study finds that a higher tunnel mass in sub-2 nm oxides points to a microstructural shift, while reduced high-k thickness simultaneously lowers leakage and improves PBTI endurance. The result is a calibrated model intended to guide designers as they push high-k scaling in next-generation FD-SOI technologies.

Two additional papers extend CEA-Leti’s reach into RF noise and 3D sequential integration. “Ground-Plane Effect on Random Telegraph Noise in Mesa-Isolated SOI MOSFETs for 3D Sequential CISi,” presented Tuesday, March 24, from 11:20 to 11:45 PM, with authors Ahmed Machmach of STMicroelectronics and contributions from Joris Lacord and Fabienne Ponthenier of CEA-Leti, shows that increasing substrate or ground-plane bias reshapes the channel electric field. This pushes more oxide-trap events above the detection threshold and amplifies current spikes, creating a controllable RTN boost that can help designers predict and mitigate noise in 3D sequential CMOS image sensors.

Finally, “Thermal Robustness of a CMOS-Compatible GaN-on-Si MIS-HEMT Technology” and the other reliability studies are supported by NexGen 2030, FAMES Pilot Line and IRT Nanoelec, reflecting the broader ecosystem backing CEA-Leti’s work. Taken together, the seven papers present a consistent message: reliability can be engineered earlier in the design flow through better modeling, better materials and better layout choices, whether the target is RF power amplifiers, advanced logic, image sensors or high-temperature power electronics.

Résumé
Le CEA-Leti présentera à l’IRPS 2026 son expertise intégrée en fiabilité des microélectroniques, en mettant en avant ses travaux sur la caractérisation, la modélisation et l’amélioration de la robustesse des composants. L’organisme français souligne ainsi son rôle auprès des industriels et des chercheurs pour sécuriser les technologies avancées, dans un contexte où la fiabilité devient un enjeu clé pour les puces de nouvelle génération.

RPS - International Reliability Physics Symposium

Seven Papers Present Early‑Stage Insights to Guide Technology Developers And Circuit Designers Toward Robust, Industrial‑Grade Solutions​

​​​GRENOBLE, France — March 17, 2026 — AtIRPS 2026, the premier forum for new and original research in microelectronics reliability, CEA‑Leti will present seven papers that reflect a broad and integrated expertise across device physics, process integration, RF technologies, FD‑SOI, GaN, BEOL reliability, and low‑temperature platforms enabling 3D sequential integration. Institute research engineers also contributed to two other projects whose work will be presented.

The papers demonstrate the institute's ability to combine innovative characterization methods with physics‑based modelling, delivering early‑stage reliability insights that guide both technology developers and circuit designers toward robust, industrial‑grade solutions.

“RF Aging Extensive Characterization & Modeling for Reliability‑Aware Power Amplifier Design"

Thursday, March 26, 1:35‑2:00 PM

Authors: Tarek Daher, Alexis Divay in collaboration with STMicroelectronics

A novel methodology directly measures hot‑carrier‑induced (HCI) lifetime of standalone SOI power amplifiers under realistic RF stress, covering varied bias conditions and load‑impedance mismatches. Empirical time‑to‑failure contour maps are generated, giving designers immediate visibility into performance‑reliability trade‑offs during early PA design for emerging mmWave 5G and beyond‑5G applications.​

“Thermal Robustness of a CMOS‑Compatible GaN‑on‑Si MIS‑HEMT Technology"

Thursday, March 26, 3:25‑3:50 PM

1,400 h, up‑to‑375 °C unbiased storage tests on 0.15 µm SiN/InAlN/GaN MIS‑HEMTs (CMOS‑compatible) show only modest Vth shift (≈‑200 mV), ~20 % contact‑resistance rise, and small drops in Id and gm. Microscopy confirms no side‑wall interdiffusion thanks to a refractory alloy gate. The devices remain electrically stable at extreme temperatures, proving GaN power blocks can be monolithically integrated on silicon for high‑temperature automotive or aerospace electronics.

“Reaching the BTI 10‑Year Lifetime for 2.5 V BEOL‑Compatible (2.5‑rated CMOS that can be stacked in 3D sequential processes without exceeding 420 °C.

“Influence of Channel Doping on HCI Degradation in Analog SOI nMOSFETs"

Tuesday, March 24, 4:30‑4:55 PM

TCAD simulations and experimental validation show that lower channel doping expands the impact‑ionization region, increasing hot‑carrier generation and interface‑trap formation in nitrided SiO₂‑gate SOI nMOSFETs. Incorporating the channel implantation dose into the Takeda model accurately predicts the observed rise in time‑to‑failure, providing a clear path for analog designers to mitigate HCI by tailoring doping profiles.

“Improving Electromigration Lifetime Through Power‑Grid Segmentation: An Experimental Study"

Thursday, March 26, 2:00‑2:25 PM

Authors: Robert Bloom (University of Minnesota) with contribution from Stéphane Moreau (CEA-Leti)

Silicon‑level EM tests on segmented power‑grid structures exploit the Blech effect: shorter segments reduce stress‑migration‑driven void formation, yielding markedly longer time‑to‑failure and smaller IR‑drop shifts. Segmenting BEOL power grids becomes a practical, layout‑level knob to boost EM robustness in advanced nodes carrying high currents.

“Ground-Plane Effect on Random Telegraph Noise in Mesa-Isolated SOI MOSFETs for 3D Sequential CISi"

Tuesday, March 24, 11:20‑11:45 PM

Authors: Ahmed Machmach (STMicroelectronics) with contribution from Joris Lacord and Fabienne Ponthenier (CEA-Leti)

Increasing the substrate (ground‑plane) bias reshapes the channel's electric field, pushing more oxide‑trap events above the detection threshold and amplifying their current spikes. This controllable RTN boost helps designers predict and mitigate noise in 3‑D sequential CMOS image sensors.

“Dit-Nt Correlation in pBTI Stressed SOI nMOSFET via Low Frequency Noise Measurements"

Tuesday, March 24, 2:00-2:25 PM

Low‑frequency‑noise measurements show that as pBTI stress progresses, oxide‑trap density (Nt) rises in lockstep with interface‑trap density (Dit). The tight correlation indicates that interface quality dominates stress‑induced noise, emphasizing the need for robust interface engineering in future FD‑SOI devices.

“Spacer Trapping Effect on Hot‑Carrier Degradation Dynamics for Advanced FD‑SOI Nodes"

Wednesday, March 25, 2:00‑2:25 PM

Comparing high‑ vs. low‑trapping SiCO spacers reveals that trapped charge in spacers dominates early HCI wear but saturates quickly; low‑trapping spacers completely suppress this early degradation. Spacer material selection is a decisive lever for extending device lifetime in forthcoming GAA and CFET platforms.​

“Modeling the Impact of HK Thickness Scaling (Down to 1.1 nm) on Gate Leakage and PBTI in Advanced FD‑SOI Devices"

Tuesday, March 24, 4:05‑4:30 PM

Author: Elhadji Alhousseyni Diallo

Using direct‑tunnelling physics and Comphy simulations, this study quantifies how ultra‑thin high‑k (HK) layers affect gate leakage and positive‑bias‑temperature‑instability (PBTI). A higher tunnel mass in sub‑2 nm oxides indicates a microstructural shift, while reduced HK thickness simultaneously lowers leakage and improves PBTI endurance. The results provide a calibrated model that designers can employ when pushing HK scaling for next‑generation FD‑SOI technologies.​​

This work was supported by NexGen 2030, FAMES Pilot Line and IRT Nanoelec.​​

AI Insight
Core Point

CEA Leti will present its microelectronics reliability expertise at IRPS 2026, signaling continued focus on making advanced chips and systems more durable and production-ready.

Key Players

CEA Leti — French applied research institute focused on microelectronics and advanced technologies, based in Grenoble, France.

Industry Impact
  • ICT: Medium — reliability is critical for semiconductor and device performance.
  • Computing/AI: Medium — dependable chips are essential for advanced compute hardware.
Tracking

Monitor — relevant for semiconductor reliability trends, but this is a showcase announcement rather than a major market event.

Highlights
Local Research Upcoming Event
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半导体 科研
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2026-03-26 17:52
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