第22届希尔顿黑德固态传感器、执行器与微系统科学与技术研讨会将于5月31日至6月4日在南卡罗来纳州希尔顿黑德岛的Sonesta度假村举行。 希尔顿黑德研讨会吸引了350至500名来自学术界、工业界和政府的参与者,他们拥有多元的工程与科学背景,涵盖化学、材料科学、化学工程、电气工程、机械工程、物理学、生物学、生物工程等领域。

The 22nd in the series of Hilton Head Workshops on the science and technology of solid-state sensors, actuators, and microsystems will take place May 31 to June 4 at the Sonesta Resort on Hilton Head Island, SC. The Hilton Head Workshop draws 350-500 academic, industry, and government participants from diverse engineering and scientific backgrounds, including chemistry, materials science, chemical engineering, electrical engineering, mechanical engineering, physics, biology, bioengineering, etc.

CEA-Leti Original
摘要
法国CEA-Leti宣布将在2026年Hilton Head国际会议上展示结合硅光子与高性能MEMS的新一代光机械传感器,并发表高动态范围GHz光机械谐振器和集成真空等论文,用以推动计时应用和高性能器件革新。该机构还预告将主办“类器官及器官芯片”研讨会,并在LID世界峰会与ECTC上以11篇论文确立其在先进硅集成领域的领先研究地位。

第22届希尔顿黑德固态传感器、执行器与微系统科技研讨会将于2026年5月31日至6月4日在美国南卡罗来纳州希尔顿黑德岛Sonesta度假村举行。这一年度盛会汇聚350至500位来自学术界、工业界和政府的多学科参与者,背景涵盖化学、材料科学、化学工程、电气工程、机械工程、物理学、生物学与生物工程等领域,为微系统技术的前沿交流提供了重要平台。

MEMS领域自上世纪80年代以来已从简单的电容式传感器演进至高灵敏度压阻式传感器。本次会议将有一场专题报告勾勒MEMS发展路线图,聚焦推动下一代器件的创新材料与传感技术,尤其在MEMS麦克风和光机械传感方向上的突破。CEA-Leti亦将在此期间展示其最新研发成果。

CEA-Leti在会场设立展台,现场演示其光机械传感器。这款新一代器件由该研究所将硅光子学与高性能MEMS相融合,相较传统传感器实现了技术革新。展台将开放讨论微系统领域的最新进展,为产业合作提供对接窗口。

在6月3日下午2:30,CEA-Leti专家将在两个分会场分享关键科学成果:Session 2WP-25报告《高动态范围与高品质因数的GHz光机械谐振器,面向计时应用》,以及Session 2WP-37报告《面向高性能MEMS器件的集成真空表征》。MEMS产业合作伙伴经理Pierre-Damien Berger将负责现场联络,参会者可直接与其沟通合作细节。

除本次研讨会外,CEA-Leti还预告了后续重磅活动:2026年9月29日,CEA将在法国格勒诺布尔主办“类器官与类器官芯片”研讨会;6月23日至25日,LID世界峰会将在加州圣何塞举行,吸引超过1250名半导体产业专业人士,提供直接接触最新技术进展的契机。此外,在先进硅集成领域,CEA-Leti以11篇论文(含混合键合与低温工艺等方向)的阵容凸显了其在该领域的核心研究地位,相关专家将在502号展位详细解读论文与海报成果,加速技术向产业转化的步伐。

Summary
CEA-Leti will present a MEMS development roadmap and exhibit an optomechanical sensor demo at the Hilton Head 2026 workshop, highlighting next-gen devices that merge silicon photonics with high-performance MEMS. The institute will also share findings on GHz optomechanical resonators and integrated vacuum characterization, reinforcing its position as a leader in advanced microsystems. Pierre-Damien Berger is the contact for MEMS industrial partnerships.

The 22nd Hilton Head Workshop on solid-state sensors, actuators, and microsystems runs May 31–June 4, 2026, at the Sonesta Resort in Hilton Head Island, South Carolina. The event typically draws 350–500 participants from academia, industry, and government, spanning chemistry, materials science, electrical and mechanical engineering, physics, biology, and bioengineering.

CEA-Leti will attend with a booth demonstrating its latest optomechanical sensor technology, which the institute describes as a leap beyond conventional sensors by merging silicon photonics with high-performance MEMS. The presentation accompanying the exhibit will trace the MEMS roadmap from early capacitive devices to advanced piezoresistive sensors, highlighting the novel materials and transduction methods enabling next-generation microphones and optomechanical systems.

On June 3, during the afternoon session, two CEA-Leti papers will be presented. The first (Session 2WP-25) covers high-dynamic-range, high-Q-factor GHz optomechanical resonators for timing applications. The second (Session 2WP-37) examines the characterization of integrated vacuum packaging for high-performance MEMS devices. Pierre-Damien Berger, MEMS Industrial Partnerships Manager, is the contact for inquiries.

Beyond Hilton Head, CEA-Leti has several other 2026 events on its agenda. On September 29 in Grenoble, it will host an "Organoids & Organoids-on-Chip" workshop at the Y-Spot Partners venue. From June 23–25, the institute participates in the LID World Summit in San Jose, California, which expects over 1,250 semiconductor professionals. In a separate forthcoming conference, CEA-Leti will present 11 papers on advanced silicon integration, including seven papers and posters on hybrid bonding and low-temperature processing, reinforcing its position as a leading research center in that domain. Experts will be available at booth 502 to discuss these findings.

Résumé
Le CEA-Leti présentera à la conférence Hilton Head 2026 une démonstration de capteurs optomécaniques révolutionnaires alliant photonique sur silicium et MEMS haute performance. Cette innovation, portée par Pierre-Damien Berger, responsable des partenariats industriels MEMS, marque une rupture technologique pour les microsystèmes de prochaine génération.

From 5/31/2026 to 6/4/2026South Carolina, USA

The field of Microelectromechanical Systems (MEMS) has evolved significantly since the 1980s, transitioning from simple capacitive sensors to highly sensitive piezoresistive sensors. This presentation will outline the development roadmap for MEMS, emphasizing innovative materials and sensing technologies that are driving next-generation devices, particularly in microphone MEMS and optomechanical sensing.

COME AND MEET CEA-LETI'S EXPERTS

This year, CEA-Leti’s booth will exhibit optomechanical sensor demo. Come and discuss lastest achievements in terms of microsystems.​

CEA-Leti’s optomechanical sensors represent a technological revolution compared to conventional sensors. This new generation of optomechanical sensors developed by CEA-Leti ​combines silicon photonics and high-performance MEMS.

DISCOVERCEA-LETI’S MAJOR SCIENTIFIC RESULTS

June 3, 2026 - 2:30 PMSession 2WP-25​​

High Dynamic Range And Q-Factor Ghz Optomechancial Resonators For Timing Applications​

June 3, 2026 - 2:30 PMSession 2WP-37​

Characterization Of Integrated Vacuum For High Performance Mems Devices​

MEMS Industrial Partnerships Manager​​

More information onHILTON HEADwebsite

From5/31/2026to6/04/2026|​South Carolina, USA

Contact:Pierre-Damien BERGER​​with any questions.​​

MEMS Industrial Partnerships Manager

Event | Agenda|Y-Spot Partners, Grenoble, France

We are delighted to announce that CEA is hosting the "Organoids & Organoids-on-Chip" workshop at its Grenoble site on September 29, 2026.

Event|Maison Minatec, Grenoble, France

LID World Summit from 23 to 25 June offer you a front-row seat to our most recent advances. Join more than 1,250 semiconductor industry professionals at this three-day global event and come away equipped and inspired to innovate!​

Event | Agenda|San Jose, California, US

Avec 11 papiers, le Leti se positionne comme un centre de recherche incontournable dans le domaine de l'intégration ultime sur silicium.

CEA-Leti experts will be onsite at booth 502 and available to discuss the findings of Seven Papers and Posters Includes Hybrid Bonding and Low-Temperature Processing

With 11 papers, Leti has established itself as a leading research centre in the field of advanced silicon integration.​

AI Insight
Core Point

CEA-Leti 将在 Hilton Head 研讨会上展示其颠覆性的光机械传感器技术,该技术融合硅光子和高性能 MEMS,标志着传感领域向高灵敏度、新架构的重大跨越,有望重塑下一代麦克风和计时设备。

Key Players
  • CEA-Leti — 法国格勒诺布尔的微电子与微系统研究机构,专注 MEMS 与硅光子集成创新。
Industry Impact
  • Terminals/Consumer Electronics: High — 光机械传感器可显著提升麦克风等消费级 MEMS 器件的性能与集成度。
  • Computing/AI: Medium — GHz 级光机械谐振器为高精度计时提供新方案,影响计算与数据中心时钟架构。
  • ICT: Medium — 高性能 MEMS 与集成真空技术可应用于通信、射频前端等基础设施。
Tracking

Monitor — CEA-Leti 展示的是早期科研成果,但光机械传感架构具有平台级潜力,需持续跟踪其商业化路径。

Highlights
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2026-05-14 15:15
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